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Oxford Plasmalab System 100

225 bytes removed, 7 years ago
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<!-- Set the resource ID, 5 digit # found on the scheduler -->{{#vardefine:toolid|10051}}<!-- Set the Process Technology (see subcategories on Equipment page) -->{{#vardefine:technology|RIE}}<!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->{{#vardefine:restriction|2}}
{{infobox equipment
|caption =
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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