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STS APS DGRIE

37 bytes removed, 7 years ago
** Refurbish turbo pump
After any chamber maintenance, the etch rate of the [[/Processes/uk submicron etch |/Processes/uk submicron etch]] is checked, as described to verify the condition of the tool.To verify the condition of the tool The etch is run for 2 minutes on a 6" oxide coated wafer and the etch rate is measured in 25 locations. The average of this is shown below.
===Process name===
To verify the condition of the tool an etch is performed on the [[/Processes/uk submicron etch|/Processes/uk submicron etch]], run for 2 minutes. The etch rate is measured on a 6" oxide coated wafer in 25 locations. The average of this is shown below.
{{#widget:Iframe
|url=https://docs.google.com/spreadsheets/d/1Z7exxRgQS92mqxQBqHo7MwRHYQXVszPzD8WyrJB9870/pubchart?oid=1969686906&format=interactive
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