Changes

Jump to navigation Jump to search

Acid Bench 73

285 bytes removed, 7 years ago
no edit summary
{{underlinked}}<!-- Set the resource ID, 5 digit # found on the scheduler -->{{#vardefine:toolid|71231}}<!-- Set the Process Technology (see subcategories on Equipment page) -->{{#vardefine:technology|Wet bench}}<!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->{{#vardefine:restriction|3}}
{{infobox equipment
|caption =
|gases =
|overview = [[{{PAGENAME}}#System_Overview System_overview | System Overview]]
|sop = [https://docs.google.com/document/d/1AduVT6p3tAV6EG-5MHiml61evDzBGSkPUws4AL0k1xw/preview SOP]
<!--|processes = [[{{PAGENAME}}/Processes|Supported Processes]]|userprocesses = [[LNF_User:{{PAGENAME}}_User_Processes|User Processes]]-->
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
}}
 
{{warning|This page has not been released yet.}}
Acid Bench 73 is a wet bench used for working with [[:Category:Acid|acids]], mostly for [[Wet etching|etching]] and [[cleaning]] of samples that have had metals and/or polymers on them. It is considered a [[Metals]] class tool, so wafers with metal are allowed in the bench. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.
* Automated Bottle Wash
==System Overviewoverview=====Chemicals Allowedallowed===
* [[Acetic Acid|Acetic Acid (C<sub>2</sub>H<sub>4</sub>O<sub>2</sub>)]]
* [[Aluminum Etch|Aluminum Etch]]
* [[Sulfuric acid|Sulfuric acid (H<sub>2</sub>SO<sub>4</sub>)]]
===Hardware Detailsdetails===
* Feedback control hot plate
* [[Quick dump rinse]] (QDR)/[[Cascade tank]]
**Solutions which contains toxic materials that cannot be removed by neutralization (such as gold and chromium etch) should not be aspirated or disposed of down the drain.
===Substrate Requirementsrequirements===
* Piece Part to 6 inch wafers
* Open to all approved substrates/materials
** Some materials may require the use of private beakers
===Material Restrictionsrestrictions===
{{material restrictions}}
==Supported Processesprocesses==
<!--
There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Acid 73 Processes/]] page.
-->
==Standard Operating Procedureoperating procedure==
<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
{{#widget:GoogleDoc|key=1OMOmAtD_8ezwLhNo2_KHl8ktVytkX_97HSV8_1E9Nbg}}
==Checkout Procedureprocedure==
<!-- Describe the checkout procedure for the tool. For example: -->
Checkout on Acid Bench 73 also includes checkout [[Acid Bench 72]], and [[Acid Bench 82]]. Please be prepared for this when you reach steps 5 and 6.
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,495

edits

Navigation menu