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SB-6E Bonder

139 bytes added, 7 years ago
==System overview==
===Hardware details===
* GasesUp to 550 degrees C chuck temp* 30kN tool Pressure* 4" Chuck, 6" available by request* Chamberpressure below 5.0 e-5mbar. Positive chamber pressure also available* RF / Power Specs* ChemicalsN2 atmosphere possible in chamber
===Substrate requirements===
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