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MA-BA-6 Mask-Bond Aligner

5 bytes added, 7 years ago
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===Hardware Details===
* Broadband light source calibrated to 20mJ20 mJ/sec at the 405nm 405 nm peak. Total broadband dose about 30mJ30 mJ/sec
* 4" and 6" chucks
** Backside alignment piece chuck available with staff permission.
* Flood exposure, soft, hard, and vacuum contact capable (for details, see SOP)
* Capable of topside, backside and wafer to wafer alignment
* 10mm 10 mm stage travel, 150mm 150 mm microscope objective travel with split field view camera option
===Substrate requirements===
LabUser, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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