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Plasmatherm 790

13 bytes added, 6 years ago
** [[Fluoroform|CHF<sub>3</sub>]] - 50 sccm
** [[Tetrafluoromethane|CF<sub>4</sub>]] - 42 sccm
** [[HeliumHydrogen|HeH<sub>2</sub>]] - 101 sccm
** [[Oxygen|O<sub>2</sub>]] - 100 sccm
** [[Sulfur hexafluoride|SF<sub>6</sub>]] - 52 sccm
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Administrators
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