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Plasmatherm 790
25 bytes added
,
6 years ago
→Hardware Details
* Pressure
** RIE: 5 -
10 mTorr to
1 Torr** PECVD: 50 -
500 mTorr to
2 Torr
* Chuck
Wrightsh
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser,
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