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Plasmatherm 790

25 bytes added, 6 years ago

→‎Hardware Details

* Pressure

** RIE: 5 - 10 mTorr to 1 Torr** PECVD: 50 - 500 mTorr to 2 Torr

* Chuck

OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors

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