Changes

Jump to navigation Jump to search

Plasmatherm 790

25 bytes added, 7 years ago

→‎Hardware Details

* Pressure

** RIE: 5 - 10 mTorr to 1 Torr** PECVD: 50 - 500 mTorr to 2 Torr

* Chuck

OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors

2,126

edits

Retrieved from "https://lnf-wiki.eecs.umich.edu/wiki/Special:MobileDiff/9082"