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Plasmatherm 790

25 bytes added, 6 years ago
* Pressure
** RIE: 5 - 10 mTorr to 1 Torr** PECVD: 50 - 500 mTorr to 2 Torr
* Chuck
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Administrators
2,115

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