Spinner CEE Apogee ROBIN
|Spinner CEE Apogee ROBIN|
|Sample Size||4" to 8" wafers|
|Chemicals Used||Acetone, IPA|
The Spinner CEE Apogee is a fully programmable manual dispense photoresist spinner located in the ROBIN lab near Solvent Bench 94. This tool has multiple chucks for 4”, 6", and 8" wafers.
This tool has been released. Please review the SOP, take the access quiz, and take the Spinner CEE Apogee Online Training. The online training will substitute for an initial training.
- Up to 6K rpm spin rates
- 4", 6", and 8" wafers
- If you need to spin pieces, please make a ticket
- No substrate material requirements
- Available Chucks
- 6" Chuck (Ø 3.75")
- 4" Chuck (Ø 2.25")
The Spinner CEE Apogee ROBIN is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email email@example.com for any material requests or questions.
There are 10 recipe slots in the software, used as follows:
- 4 fixed spin recipes and 1 custom recipe
- 4 recipes (1000-4000 rpm)
- Only the Custom recipe is allowed to be changed. Instructions on how to do so can be found in the SOP.
More information on the recipe details can be found in the Standard Processes section of the Equipment Manual. For more information on photoresist spinning and recommended lithography processes, please read the Lithography page. For information on a specific photoresist, please check the datasheet.
Standard operating procedure
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- Complete a Lithography training session. If you have already completed this for another tool, you do not need to complete it again.
- Take the online training and read through the SOP.
- Accurately complete the checkout quiz. You may retake as necessary until all answers are correct.
- Schedule a time for a checkout:
- Create a helpdesk ticket for final confirmation of your checkout appointment.
- Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.