Spinner CEE Apogee ROBIN

Spinner CEE Apogee ROBIN
Equipment Details
Technology	Lithography
Materials Restriction	General
Material Processed	Photoresist
Sample Size	4" to 8" wafers
Chemicals Used	Acetone, IPA
Equipment Manual
Operating Procedure	SOP

The Spinner CEE Apogee is a fully programmable manual dispense photoresist spinner located in the ROBIN lab near Solvent Bench 94. This tool has multiple chucks for 4”, 6", and 8" wafers.

Announcements

This tool has been released. Please review the SOP, take the access quiz, and take the Spinner CEE Apogee Online Training. The online training will substitute for an initial training.

Capabilities

• Allowed Photoresists
  • SPR 220 3.0
  • SU-8
  • Polyimide

System overview

Hardware details

• Up to 6K rpm spin rates

Substrate requirements

• 4", 6", and 8" wafers
  • If you need to spin pieces, please make a ticket
• No substrate material requirements
• Available Chucks
  • 6" Chuck (Ø 3.75")
  • 4" Chuck (Ø 2.25")

Please choose a chuck sized appropriately for your sample. Your sample must fully cover the top surface of the chuck to prevent photoresist from being sucked into the vacuum hole. The tools may be damaged if photoresist or solvent goes into the vacuum hole in the spindle. Incorrect chuck use will result in loss of tool access.

• 

  Correct chuck for sample

• 

  Incorrect chuck for sample - a smaller chuck should be used

Material restrictions

The Spinner CEE Apogee ROBIN is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

There are 10 recipe slots in the software, used as follows:

• 4 fixed spin recipes and 1 custom recipe
  • 4 recipes (1000-4000 rpm)
• Only the Custom recipe is allowed to be changed. Instructions on how to do so can be found in the SOP.

More information on the recipe details can be found in the Standard Processes section of the Equipment Manual. For more information on photoresist spinning and recommended lithography processes, please read the Lithography page. For information on a specific photoresist, please check the datasheet.

Standard operating procedure

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Checkout procedure

1. Complete a Lithography training session. If you have already completed this for another tool, you do not need to complete it again.
2. Take the online training and read through the SOP.
3. Accurately complete the checkout quiz. You may retake as necessary until all answers are correct.
4. Schedule a time for a checkout:
   1. Find an available time for checkout here.
   2. Verify that the tool is available in the LNF Online Services at the time you are requesting.
   3. After confirmation that the event is scheduled in Calendly, invite the staff member assigned to your event to a Staff Support reservation at that time.
5. Create a helpdesk ticket for final confirmation of your checkout appointment.
6. Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.