Tempress S1T1 - Annealing
| Tempress S1T1 - Annealing | |
|---|---|
 | |
| Equipment Details | |
| Technology | Thermal processing |
| Materials Restriction | Restricted |
| Sample Size | 100mm and/or 150mm |
| Gases Used | N2, 5%H2/N2 |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Annealing |
| Maintenance | Maintenance |
The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. Annealing in metallurgy, and material science, is a heat treatment wherein, a material is altered, causing a change in its properties such as strength, and hardness. It is a process that produces conditions by heating, and maintaining a suitable temperature, and then cooling. Annealing is used to induce softness, relieve internal stress, and to refine the structure.
Contents
Announcements
- No announcements at this time.
Capabilities
System overview
Hardware details
Substrate requirements
- Silicon only
- Can process up to 25, 100mm (4"), and or, 150mm (6") wafers
- Wafer thickness, 525um for 100mm (4"), and 675um for 150mm (6")
Material restrictions
IMPORTANT: Even if a material is approved, consideration must be made as to which recipes you run on those materials. Do not run recipes that will cause materials to melt, outgas, or contaminate the chamber.
Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under the classification described above. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported processes
Process details
Characterization data
- N/A
Standard operating procedure
Checkout procedure
- Create a Help desk Ticket requesting training.
- LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
- Schedule a checkout session with a tool engineer via the existing Helpdesk ticket. If this checkout is successful, the engineer will authorize you on the tool.
