Tempress S3T2 - Wet Oxide

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Tempress S3T2 - Wet Oxide
Equipment Details
Technology Thermal processing
Materials Restriction CMOS Clean
Sample Size 100mm and/or 150mm
Gases Used N2, O2, H2
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Wet Oxide, TEOS densification
Maintenance Maintenance

The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. Thermal oxidation of silicon is achieved by heating the wafer to a high temperature, typically 900°C to 1100°C, in an atmosphere containing either pure oxygen, or water vapor. Both, oxygen and water vapor move easily through silicon dioxide at high temperatures. Oxygen then arriving at the silicon surface can then combine with the silicon to form silicon dioxide.


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System Overview

Hardware Details

  • N2 - Maximum flow 10 slpm
  • N2 - Maximum flow 1000 sccm
  • H2 - Maximum flow 10 slpm
  • O2 - Maximum flow 10 slpm
  • TransLC - used to clean tube as part of maintenance

Substrate Requirements

  • Silicon only
  • Can process up to 25, 100mm (4"), and or, 150mm (6") wafers
  • Wafer thickness, 525um for 100mm (4"), and 675um for 150mm (6")
All samples must go through the RCA Pre-Furnace clean procedure before being processed in the furnace

Material Restrictions

The Tempress S3T2 - Wet Oxide is designated as a CMOS Clean class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Supported Processes

Process Details

Characterization Data

Standard Operating Procedure

Checkout Procedure

  1. Create a Help desk Ticket requesting training.
  2. A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
  3. Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.