Tempress S5T2 - Phosphorous Anneal/Oxidation

Tempress S5T2 - Phosphorous Anneal Oxidation
Equipment Details
Technology	Thermal processing
Materials Restriction	CMOS Clean
Sample Size	100mm and/or 150mm
Gases Used	N2, O2, H2
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported processes
Maintenance	Maintenance

The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. After the initial Phosphorous Doping, there will be a high concentration impurity profile at the wafer surface. The Drive in process is used to more evenly distribute, and drive in, the dopant throughout the silicon. The tube also has wet, and dry, oxidation capabilities.

Announcements

• The tool is down for rebuild.

Capabilities

• Phosphorous Annealing
• Wet Oxide
• Dry Oxide

System overview

Hardware details

• N₂ - Maximum flow 10 slpm
• O₂ - Maximum flow 10 slpm
• H₂ - Maximum flow 10 slpm

Substrate requirements

• Silicon only
• Can process up to 25, 100mm (4"), and or, 150mm (6") wafers
• Wafer thickness, 525um for 100mm (4"), and 675um for 150mm (6")

All samples must go through the RCA Pre-Furnace clean procedure before being processed in the furnace

Material restrictions

The Tempress S5T2 - Phosphorous Anneal Oxidation is designated as a CMOS Clean class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

• Phosphorous Annealing
• Wet Oxide
• Dry Oxide

Process details

• Process recipe overview

Characterization data

• N/A

Standard operating procedure

• Quick reference SOP
• Detailed SOP

Checkout procedure

1. Create a Help desk Ticket requesting training.
2. A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
3. Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

• Preventive maintenance for this tool is not necessary. We just fix it when it breaks