Tempress S6T1 - Annealing

Tempress S6T1 - Annealing
Equipment Details
Technology	Thermal processing
Materials Restriction	Metals
Sample Size	100mm
Gases Used	N2, O2, 5% H2/N2
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
Maintenance	Maintenance

The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. Annealing in metallurgy, and material science, is a heat treatment wherein, a material is altered, causing a change in its properties such as strength, and hardness. It is a process that produces conditions by heating, and maintaining a suitable temperature, and then cooling. Annealing is used to induce softness, relieve internal stress, and to refine the structure.

Announcements

• No announcements at this time.

Capabilities

• Annealing
• Dry Oxide
• Maximum temperature - 1100°C

System overview

Hardware details

• N₂ - Maximum flow 10 slpm
• O₂ - Maximum flow 10 slpm
• 5% H₂/N₂ - Maximum flow 10 slpm

Substrate requirements

• Silicon only
• Can process up to 25, 100 mm (4") wafers
• Wafer thickness, ~525um for 100mm (4")
• A solvent clean must be performed on any samples prior to the run
  • 5 min clean Acetone
  • 5 min clean IPA
  • 5 min fresh clean Acetone
  • 5 min fresh clean IPA
  • 3 min DI rinse

Material restrictions

The Tempress S6T1 - Annealing is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

• Annealing
• Dry Oxidation

Process details

• N/A

Characterization data

• N/A

Standard operating procedure

• Quick reference SOP

Checkout procedure

1. Create a Help desk Ticket requesting training.
2. A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
3. Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.