Tempress S6T1 - Annealing
Tempress S6T1 - Annealing | |
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Equipment Details | |
Technology | Thermal processing |
Materials Restriction | Metals |
Sample Size | 100mm |
Gases Used | N2, O2, 5% H2/N2 |
Equipment Manual | |
Overview | System Overview |
Operating Procedure | SOP |
Supported Processes | Supported Processes |
Maintenance | Maintenance |
The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. Annealing in metallurgy, and material science, is a heat treatment wherein, a material is altered, causing a change in its properties such as strength, and hardness. It is a process that produces conditions by heating, and maintaining a suitable temperature, and then cooling. Annealing is used to induce softness, relieve internal stress, and to refine the structure.
Contents
Announcements
- No announcements at this time.
Capabilities
- Annealing
- Dry Oxide
- Maximum temperature - 1100°C
System overview
Hardware details
Substrate requirements
- Silicon only
- Can process up to 25, 100 mm (4") wafers
- Wafer thickness, ~525um for 100mm (4")
- A solvent clean must be performed on any samples prior to the run
- 5 min clean Acetone
- 5 min clean IPA
- 5 min fresh clean Acetone
- 5 min fresh clean IPA
- 3 min DI rinse
Material restrictions
The Tempress S6T1 - Annealing is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported processes
Process details
- N/A
Characterization data
- N/A
Standard operating procedure
Checkout procedure
- Create a Help desk Ticket requesting training.
- A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
- Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.