Thermal evaporation
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Thermal evaporation | |
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Technology Details | |
Materials | Al, Cr, , Ti, |
Warning: | This page has not been released yet. |
Thermal evaporation is a form of physical vapor deposition in which high-purity metal source material is heated by passing current through a resistive metal "boat" and the material is transformed into vapor.
Contents
Method of operation
TBD - Currently no tool is available for thermal evaporation
Applications
This section requires expansion. |
Figures of merit/Parameters
This section requires expansion. |
Materials
The following materials can be deposited at the LNF using thermal evaporation:
Equipment
This section requires expansion. |
See also
Further reading
This section may require cleanup to meet the LNF wiki's quality standards. The specific problem is: this is the link to the e-beam evaporation overview. |