# Thermal processing

Thermal processing is...

"Technology groups" are top level technology pages and should provide a brief description of why it is a group and then an overview of technologies within that group.

See Etching and Metrology for examples of technology group pages.

## Technologies

Here is where you describe technologies within the group.

### Annealing

Main article: Annealing

Describe the technology, particularly including why you might use it over another within the same group.

### Thermal oxidation

Main article: Thermal oxidation

Here's another technology in that group.

### Diffusion and doping

Main article: Thermal oxidation

Here's another technology in that group.

### Curing

Main article: Thermal oxidation

Here's another technology in that group.

## Figures of Merit

What is important to look for in the technology? Etch/dep rate? Resolution?

## Applications

How is this technology used in nanofabrication and what types of devices/research areas is it useful in?

## Equipment

Specific equipment for each technology can be found on its page above. Additionally, below is a list of all metrology equipment in the LNF: