Thermal processing
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Thermal processing is...
"Technology groups" are top level technology pages and should provide a brief description of why it is a group and then an overview of technologies within that group.
See Etching and Metrology for examples of technology group pages.
Contents
Technologies
Here is where you describe technologies within the group.
Annealing
Describe the technology, particularly including why you might use it over another within the same group.
Thermal oxidation
Here's another technology in that group.
Diffusion and doping
Here's another technology in that group.
Curing
Here's another technology in that group.
Figures of Merit
What is important to look for in the technology? Etch/dep rate? Resolution?
FOM 1
Subheadings are optional.
Applications
How is this technology used in nanofabrication and what types of devices/research areas is it useful in?
Equipment
Specific equipment for each technology can be found on its page above. Additionally, below is a list of all metrology equipment in the LNF:
See also
Other related wiki pages
References
Further reading
- LNF Tech Talk for Thermal Processing is Coming Soon!
- Other stuff, e.g. technology workshop slides
- External links (can be in another section below, if appropriate)
