Titanium

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Titanium is a lustrous transition metal with the atomic number 22. It has a low denisty and high stregnth. Titanium is a material that is very resistant to corrosion. In appearance, it appears silvery in color.

Equipment

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

• Angstrom Engineering Evovac Evaporator
• Enerjet Evaporator
• SJ-20 Evaporator
• Lab 18-1
• Lab 18-2
• PVD 75 Proline

Etching Equipment

• Tools in the LNF for etching this material.

Characterization Equipment

• Dektak XT

Applications

• Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processes

Deposition Processes

• *E-beam evaporation

• Sputter deposition

Etching Processes

• List of technologies for etching/pattering this material and relevant process information specific to this material associated with this equipment/type of process.

Characterization Processes

• Dektak Profilometer can be used to measure the thickness of the deposited metals.

Technical Data

• Charts or specific LNF related data for this material.

References

• Citations/references for this material, review articles. If possible, examples of users publications which includes the material.