Tungsten/titanium

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Tungsten/Titanium (W-Ti) is an alloy between the elements Tungsten (W) and Titanium (Ti)

Equipment

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

Etching Equipment

  • Tools in the LNF for etching this material.

Characterization Equipment

  • Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.

Applications

  • Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processes

Deposition Processes

Etching Processes

  • List of technologies for etching/pattering this material and relevant process information specific to this material associated with this equipment/type of process.

Characterization Processes

  • List of techniques for metrology/characterization can be used with this material and relevant process information specific to this material associated with this equipment/type of process.

Other Relevant Material Information

Technical Data

  • Charts or specific LNF related data for this material.

References

  • Citations/references for this material, review articles. If possible, examples of users publications which includes the material.