YES PB8-2B-CP Vacuum Oven
| YES PB8-2B-CP Vacuum Oven | |
|---|---|
 YES PB8-2B-CP Vacuum Oven | |
| Equipment Details | |
| Technology | Thermal processing |
| Materials Restriction | Metals |
| Material Processed | Polyimides, SOG, other polymers |
| Sample Size | Pieces up to 8" wafers |
| Gases Used | Nitrogen, Argon, Oxygen, Forming Gas (5% H2/in N2) |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Maintenance | Maintenance |
The YES Oven can be used to anneal samples up to 450° C in ambient atmosphere, vacuum, or with the user’s choice of 4 background gases. The lowest vacuum achievable under vacuum is approximately 50mT. Processes with background gas normally run between 150-300 Torr. The available gases are: Nitrogen, Oxygen, Argon, and Forming Gas (5% Hydrogen in Nitrogen)
Contents
Announcements
- The tool is down due to a failed component. The new part has been ordered, but will take 7-9 weeks to receive. The part is expected to arrive the week of August 5th.
System Overview
Hardware Details
The chamber will accommodate up to 2 cassettes of 8” wafers back to back. Samples can be processed horizontally or vertically in quartz wafer boats. Small samples can be processed as well. Consult with tool engineer for sample holding suggestions.
The maximum temperature is 450°C. The oven has a maximum ramp rate of 4°C/ minute.
Background gas processes operate between 150-300 Torr. Vacuum processes stabilize at approximately 50 mTorr.
The Gas and Vacuum configuration is NOT recipe dependent. These “Process Parameters” must be verified before running any temperature profile, even one that you have run before. The previous user’s setup is the current one, and MUST be verified and altered if necessary.
The chamber is held under vacuum and at an elevated temperature (normally 50℃) to help prevent moisture buildup. See the SOP for venting instructions. You must have an active reservation to vent the tool.
Substrate Requirements
Material Restrictions
The YES PB8-2B-CP Vacuum Oven is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported Processes
Consult with tool engineers to determine if your material can be processed in this tool prior to starting your reservation.
Process parameters are material dependent, so there are no LNF supported processes for this tool.
Polymer curing recommendations are normally provided on the product Data Sheet. For other types of processing, tool engineers can offer assistance with process development.
Standard Operating Procedure
Checkout Procedure
- Create a Help desk Ticket requesting training.
- LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
- Schedule a checkout session with a tool engineer in the existing helpdesk ticket. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
Chamber cleaning is performed as needed using a 450°C O2 process. Vacuum pump oil is checked regularly and changed yearly.
