2017 HEPA Filter Changeout

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This page has been created to consolidate updates, as the work progresses, of the HEPA filter changeout.

Status update as of 5/18/17 3pm

HEPA filter and LED change has been completed, certification is done. The lab is now back to normal operation!

Overview by tool

Processing done on moves to when? Comments
Acid 72 Acid 23 week 1 & 3 Located in 1480C. Acid 23 does not have a hot plate
Acid 73 Acid 23 week 1 & 3 Located in 1480C. Acid 23 does not have a hot plate
Acid 83 Acid 23 week 1 & 3 Located in 1480C. Acid 23 does not have a hot plate
Solvent 83 & 84 Solvent 14 &22 week 1 & 3 Solvent 14 has some storage area. Solvent 14 has 2 ultrasounds tanks and PRS-2000
Gold Plating Unavailable week 1 Bench will be closed
Base 63 Acid 23 Week 1 (second half) Mostly for III-V users
Microscopes & Workstations 1480C Week 3 (second half)
CEE 100, 200, developer spinners unavailable Week 1 (second half)
XeF2 unavailable week 1 & 3
Angstrom Engineering Furnace unavailable Week 1 & 3
Tempress Furnaces unavailable Week 1 & 3
Denton Sputtering unavailable Week 1 & 3
Evaporators and RTP tools unavailable Week 2
LAM 9400, Plasmatherm, Oxford ICP, Oxford ALD, GSI PECVD unavailable Week 2
Aligners, Bonders, Stepper, ACS, Image Reversal Oven unavailable Week 3
MBE rooms Unavailable Week 2 (second half)

See further details below http://lnf-wiki.eecs.umich.edu/wiki/2017_HEPA_Filter_Changeout#Wet_bench_plan_-_details.

Map

Lab Areas that will be affected by the filter change

Schedule and Update

Week 1 (April 24 - April 28) *** work is complete ***

  • Area 1 (1440A, 1440B)
  • Area 2 (1440C)

Week 2 (May 1 - May 5) *** work is complete ***

  • Area 2 (1440D)
  • Area 3 (1440E)
  • Area 4

Week 3 (May 8 - May 12) *** work is complete ***

  • Area 5 (1450 submicron room)
  • Area 6 (1440 S front of the lab): This is the main corridor to 1440 A, B, C, D and E so also affects access to these bays.

Week 4 (May 15 - May 19) *** work is complete ***

Filter Testing. The lab will be fully open.

Wet bench plan - details

In order to minimize the impact of the lighting and filter work on our users we have developed the following plan for the wet benches. Acid 23 and Solvent 22 will temporarily be available to everyone during the light/filter change event.

  • Week 1

Area 1: Processing normally done a Acid Benches 72, 73, and 83 will move to Acid 23 in 1480C. Acid 23 does not have a hot plate. Processing normally done at Solvent Benches 83 and 84 will move to Solvent Benches 14 and 22. Solvent 22 has some storage area, Solvent 14 has 2 ultrasound tanks and a PRS-2000 crystallizing dish.

  • Week 3

Area 6: We will lose access to 1440A and 1440B (Area 1) during this time. We will follow the same protocols as Area 1. We will work to maintain access to the solvent cabinet so people have access to private photoresists.