ACS 200 cluster tool

ACS 200 cluster tool
Equipment Details
Technology	Lithography spin coating/developing
Materials Restriction	Semi-Clean
Material Processed	spr 220, 1813, and LNF approved photo resist syringes
Chemicals Used	MF300, MF319, EBR
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

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Announcements

• Update this with announcements as necessary

Capabilities

• Automated spin coating
• Automated spray developing
• 4" and 6" wafers

PMMA and other e-beam resists should be processed in Photoresist Bench 31 in 1480A

Any other non standard photoresist must have direct approval of tool owner

SU-8 may only be processed in the ROBIN lab

System overview

Hardware details

• RC-8 spin coater with gyrset closed cover option
• 4" chuck will accommodate 6"
• spr 220(3.0) and 1813 photo resists automatically dispensed.
• All other approved resists can be coated with EFD dispense option.
• Spray develop module fitted with MF300 and MF319
• Hot plate ovens and HMDS vapor prime chamber
• Fully automated robot handling

Substrate requirements

• 4" and 6" wafers
• glass wafers not preferred for baking

Material restrictions

The ACS 200 cluster tool is designated as a Semi-Clean class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on ACS 200 cluster tool user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

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Checkout procedure

1. Read through this page and the Standard Operating Procedure above.
2. Practice with your mentor or another authorized user until you are comfortable with tool operation.
3. Create a Helpdesk Ticket requesting training/checkout.
4. A tool engineer will schedule a time for training/checkout

Maintenance

Complete spinner clean and conditioning are done semi annually or as needed. Fluid and resist fills are done/checked weekly. Hot plate ovens checked bi weekly and cleaned as needed. Spray develop checked weekly and maintained as needed. Robot training performed annually or as needed.