ACS 200 cluster tool
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| ACS 200 cluster tool | |
|---|---|
 | |
| Equipment Details | |
| Technology | Lithography |
| Materials Restriction | Semi-Clean |
| Material Processed | SPR 220, SPR 955 0.9, and LNF approved photo resist syringes |
| Chemicals Used | MF 300, MF 319, EBR, Acetone, HMDS |
| Equipment Manual | |
| Overview | System Overview |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
The ACS 200 cluster tool has been decommissioned. Please use the TEL Mark Vz Coater.
