ACS 200 cluster tool
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|ACS 200 cluster tool|
|Material Processed||SPR 220, SPR 955 0.9, and LNF approved photo resist syringes|
|Chemicals Used||MF 300, MF 319, EBR, Acetone, HMDS|
|Supported Processes||Supported Processes|
|User Processes||User Processes|
The ACS 200 cluster tool has been decommissioned. Please use the TEL Mark Vz Coater.