ADT 7100 Dicing Saw

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ADT 7100 Dicing Saw
Equipment Details
Technology Packaging
Materials Restriction Undefined
Sample Size Pieces to 6 inch circular (150 mm)
Equipment Manual
Overview System Overview
Operating Procedure [1]
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance

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The ADT 7100 Dicing Saw is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm. It is currently capable of dicing up to 6" diameter wafers.


  • Update this with announcements as necessary


  • Cut Depth, Depends on blade.
  • Wafer Size, Up to 6 inches or 150 mm

System Overview

Hardware Details

  • Indexing accuracy, 0.00004 inch or 1.0 µm
  • Cumulative accuracy, 0.00006 inch or 1.5 µm
  • Cut Depth Accuracy, 0.000078 inch or 2.0 µm
  • Rotary Axis Accuracy, 4 arc-seconds
  • Chuck Rotation, 0 to 350 degrees
  • Feed Rate, Up to 13.7 inches/second or 350 mm/second
  • Return Stroke, 13.7 inches/second or 350 mm/second
  • Camera Magnification, Up to 120x
  • Blade Diameter, 2 to 3 inches or 50 to 76 mm
  • Spindle Speed, Up to 60,000 rpm

Substrate Requirements

  • Wafer Size
  • Wafer type
  • Any mounting?
  • Wafer thickness

Material Restrictions

The ADT 7100 Dicing Saw is designated as a Undefined class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email for any material requests or questions.

Supported Processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on ADT 7100 Dicing Saw User Processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard Operating Procedure

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Checkout Procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Complete the training request form here.
  3. Create a Helpdesk Ticket requesting training.
  4. A tool engineer will schedule a time for initial training.
  5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  6. Complete the SOP quiz here.
  7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Tool Qualification

Process Name