AZ 12XT
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Az 12XT is a chemical enhanced positive tone photo resist (PR). Being a chemical enhanced PR the exposure creates a latent image and a week acid in the PR. The chemical reaction that makes the PR soluble in developer happens during the post exposure bake (PEB). This makes the length and temperature of the PEB extremely important.
Contents
Equipment
- CEE 100CB photoresist spinner
Storage Locations
- Solvent Bunker
Hazards
Chemicals
What makes up this chemical
Properties
What are properties of this chemical
Processes
- There are currently no processes defined that use this chemical.
Process SOPs
- There are currently no process SOPs defined for this chemical.
Hazardous Waste
How is this chemical disposed of or collected
Technical Data Sheet
- There are currently no data sheets for this chemical.
Safety Data Sheet
- There are currently no Safety Data Sheets (SDSes) for this chemical.
References
- Other links that are useful