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AZ 400K is a potassium borates and potassium hydroxide based developer used for developing positive resist. It is not CMOS compatible so after using this developer you cannot go into CMOS clean or Semi clean furnaces and tools.
- Used for 9260 resist
- KOH is not compatible with semi clean or clean tools
AZ 400K should be collected in Hazardous waste containers.
- Photoresist developing
- There are currently no process SOPs defined for this chemical.
Technical Data Sheet
Safety Data Sheet
- Other links that are useful