Difference between revisions of "Acid Bench 12"

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{{#vardefine:toolid|71011}}{{#vardefine:technology|Wet bench}}{{#vardefine:restriction|3}}{{infobox equipment
<!-- Set the resource ID, 5 digit # found on the scheduler -->
 
{{#vardefine:toolid|71011}}
 
<!-- Set the Process Technology (see subcategories on Equipment page) -->
 
{{#vardefine:technology|Wet bench}}
 
<!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->
 
{{#vardefine:restriction|3}}
 
{{cleanup-infobox}}
 
{{infobox equipment
 
 
|caption = Acid Bench 12
 
|caption = Acid Bench 12
 
|materials = Silicon and Glass wafers
 
|materials = Silicon and Glass wafers
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*[[Sulfuric acid|Sulfuric acid (H<sub>2</sub>SO<sub>4</sub>)]]
 
*[[Sulfuric acid|Sulfuric acid (H<sub>2</sub>SO<sub>4</sub>)]]
 
|overview = [https://docs.google.com/a/lnf.umich.edu/document/d/1NIPU9PzxP-K5kgHtFzqYRASU7I__zXsh7pS-nw0aBDM/preview System Overview]
 
|overview = [https://docs.google.com/a/lnf.umich.edu/document/d/1NIPU9PzxP-K5kgHtFzqYRASU7I__zXsh7pS-nw0aBDM/preview System Overview]
|sop = [https://docs.google.com/a/lnf.umich.edu/document/d/150ogTPU8aUa5iHyNCoiWk-FPL1aULHnXUocslTzMEIE/preview SOP]
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|sop = [https://docs.google.com/presentation/d/1fsW4g989coaibnPBWGiSNeFD5Kd-XL-iLxtGHjPBn5Y/edit?usp=sharing SOP]
|processes = [https://docs.google.com/a/lnf.umich.edu/document/d/150ogTPU8aUa5iHyNCoiWk-FPL1aULHnXUocslTzMEIE/preview Processes]
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|processes = [https://docs.google.com/document/d/1Y5nKkGHPLSVjauCdjbLeNXADGqHhIfrmEI8WUqxx37M/edit?usp=sharing Processes]
|maintenance = [https://docs.google.com/a/lnf.umich.edu/document/d/1IhYl8x0rMAfT42uEqo6c6UbqDV1RbC7SlFVzOU9frAo/preview Maintenance]
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|maintenance = [hhttps://docs.google.com/document/d/1iQtyMhljghduyUj0k97MS6v6LCBJHdnKcUoplTfFjMk/edit?usp=sharing Maintenance]
 
}}
 
}}
  
{{warning|This page has not been released yet.}}
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[[{{PAGENAME}}]] is used for working with [[acids]], mostly for [[etching metals]], pattering and cleaning substrates that have had metals on them.  It is considered a  [[Metals]] class tool, so wafers with metal are allowed in the bench with some restrictions.  It is intended for use with 4” and 6” Si and glass substrates only. Only the processes listed below are allowed in this bench.
 
 
<!-- Insert the tool description here -->
 
This wet bench is used for working with acids, mostly for [[etching metals]], pattering and cleaning substrates that have had metals on them.  It is considered a  metals bench, so wafers with metal are allowed in the bench with some restrictions.  It is intended for use with 4” and 6” Si and glass substrates only. Only the processes listed below are allowed in this bench.
 
 
   
 
   
 
==Announcements==
 
==Announcements==
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===Hardware Details===
 
===Hardware Details===
  
This bench contains 2 heated chemical baths, DI quick dump rinse tank (QDR), timers, and 4 unheated chemical baths.
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This bench contains 2 heated static chemical baths, DI [[Quick dump rinse]] tank (QDR), timers, and 4 unheated static chemical baths.
  
 
===Safety===
 
===Safety===
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Working with chemicals can be very dangerous.  Chemicals used at this bench are some of the most hazardous in the lab.  To minimize the chance of accident, make sure you always:  
 
Working with chemicals can be very dangerous.  Chemicals used at this bench are some of the most hazardous in the lab.  To minimize the chance of accident, make sure you always:  
 
*Wear personal protective equipment.  Required PPE at this bench is an apron, face shield, and Trionic gloves.
 
*Wear personal protective equipment.  Required PPE at this bench is an apron, face shield, and Trionic gloves.
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*[http://lnf-wiki.eecs.umich.edu/wiki/LNF_Glove_Policy LNF Glove Policy]
 
*Know the properties and hazards of chemicals you are working with.  If you don’t know, find out by reading about them or asking staff.
 
*Know the properties and hazards of chemicals you are working with.  If you don’t know, find out by reading about them or asking staff.
 
*Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use.  Plan how you will rinse your sample and what you will do with any waste generated.  Make sure you know how the controllers work.
 
*Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use.  Plan how you will rinse your sample and what you will do with any waste generated.  Make sure you know how the controllers work.
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==Supported Processes==  
 
==Supported Processes==  
{{main|{{PAGENAME}}/Processes}}
 
 
{{expand section}}
 
{{expand section}}
 
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=}} -->
 
<!-- We recommend creating a subpage detailing the supported processes for the tool, which will be generated if you leave the link below. Alternatively, you may include the information on this page. In that case, the Supported Processes document from the equipment manual can be included here, using {{#widget:GoogleDoc|key=}} -->
 
LNF Standard Processes in this bench
 
LNF Standard Processes in this bench
* [[Aluminum Etch|Aluminum Etch]]
 
* [[Aqua Regia|Aqua Regia]]
 
* [[BHF|BHF]]
 
* [[Chromium Etch|Chromium Etch]]
 
* [[Dilute HF (49% - 100:1 DI:HF)|Dilute HF]]
 
* [[Gold Etch|Gold Etch]]
 
* [[Nanostrip|Nanostrip]]
 
* [[Piranha Etch|Piranha Etch]]
 
  
{{#widget:GoogleDoc|key=150ogTPU8aUa5iHyNCoiWk-FPL1aULHnXUocslTzMEIE}}
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{{#widget:GoogleDoc|key=1Y5nKkGHPLSVjauCdjbLeNXADGqHhIfrmEI8WUqxx37M}}
  
 
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
 
<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
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==Standard Operating Procedure==
 
==Standard Operating Procedure==
 
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<!-- To include a document from google docs, use the line below, replace "googledocid" with the ID for the document. Remember, to make this visible, you must set Sharing for the document to "Anyone with the link can view". -->
{{#widget:GoogleDoc|key=10YmH0hEqs93PQjdbXYTyJ4pe-bUXwsSoPpXX3ds0xlg}}
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See the standard operating procedure below:
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==Checkout Procedure==
 
==Checkout Procedure==
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# Read through this page and the Standard Operating Procedure above.
 
# Read through this page and the Standard Operating Procedure above.
 
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
 
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
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# Fill out [https://docs.google.com/forms/d/e/1FAIpQLScv9PDTq-3nFVrJf_9HG0xi7wZNZVCEVTcW-IhgWFhlnkds4g/viewform?usp=sf_link Process Information Form]. You will need to fill this out for each bench you plan on using.
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# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1GBVkTiMtgBPZp6zcyrzDCSIw-I8oq1Pbq4-ADioQN1Y/viewform Acid Bench 12 quiz].
 
# Open a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket] and request a checkout.  
 
# Open a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket] and request a checkout.  
 
# A tool engineer will schedule a time for checkout.
 
# A tool engineer will schedule a time for checkout.
# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1GBVkTiMtgBPZp6zcyrzDCSIw-I8oq1Pbq4-ADioQN1Y/viewform Acid Bench 12 quiz].
 
# If you pass the quiz the tool engineer will authorize you on the tool.  If not you will be contacted to repeat.
 
  
 
==Maintenance==  
 
==Maintenance==  
 
<!-- Describe standard maintenance/qualification tests here -->
 
<!-- Describe standard maintenance/qualification tests here -->
 
* Bench is checked for issues twice a week during lab clean
 
* Bench is checked for issues twice a week during lab clean
* Nanostrip is changed weekly
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* Nanostrip is changed by staff weekly on Thursdays at 9:30
* Chrome etch and gold etch are changed monthly
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* Chromium etch and gold etch are changed by staff every six weeks
  
 
==User supported maintenance==
 
==User supported maintenance==
 
Please only make the following changes if you have been trained and are comfortable doing this. If you have an issue that is not detailed or are not trained please create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket].
 
Please only make the following changes if you have been trained and are comfortable doing this. If you have an issue that is not detailed or are not trained please create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket].
 
===Chemical Change===
 
===Chemical Change===
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[[Nano-strip Tank Change]]
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===Broken DI Gun===
 
===Broken DI Gun===
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* Go in the back service aisle and turn off the inlet water to the bench
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* Contact staff via a Helpdesk ticket
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===Broken Nitrogen Gun===
 
===Broken Nitrogen Gun===
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{{#widget:GoogleDoc|key=1iQtyMhljghduyUj0k97MS6v6LCBJHdnKcUoplTfFjMk}}

Latest revision as of 13:27, 19 November 2021

Acid Bench 12
71011.jpg
Acid Bench 12
Equipment Details
Technology Wet bench
Materials Restriction Metals
Material Processed Silicon and Glass wafers
Sample Size 4" and 6"
Chemicals Used
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Processes
Maintenance [hhttps://docs.google.com/document/d/1iQtyMhljghduyUj0k97MS6v6LCBJHdnKcUoplTfFjMk/edit?usp=sharing Maintenance]


Acid Bench 12 is used for working with acids, mostly for etching metals, pattering and cleaning substrates that have had metals on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with 4” and 6” Si and glass substrates only. Only the processes listed below are allowed in this bench.

Announcements

  • Update this with announcements as necessary

System Overview

Chemicals Allowed

Hardware Details

This bench contains 2 heated static chemical baths, DI Quick dump rinse tank (QDR), timers, and 4 unheated static chemical baths.

Safety

Proper PPE for this bench are apron, face shield, trionic gloves and safety glasses
Warning Warning: You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always:

  • Wear personal protective equipment. Required PPE at this bench is an apron, face shield, and Trionic gloves.
  • LNF Glove Policy
  • Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
  • Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
  • Only process 4” and 6” wafers.
  • Do not use this bench without proper training.
  • Waste from this bench goes into the LNF’s acid waste neutralization system and then to city sewers.
    • No solvents can be used or disposed of here.
    • Solutions which contains toxic materials that cannot be removed by neutralization (such as gold and chromium etch) should not be aspirated or disposed of down the drain.

Substrate Requirements

  • 4 and 6 inch wafers
  • Glass and Silicon

Material Restrictions

The Acid Bench 12 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported Processes

LNF Standard Processes in this bench

Widget text will go here.


Standard Operating Procedure

See the standard operating procedure below:

Widget text will go here.

Checkout Procedure

  1. Take the General Wet Bench Training, if you haven't already.
  2. Read through this page and the Standard Operating Procedure above.
  3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  4. Fill out Process Information Form. You will need to fill this out for each bench you plan on using.
  5. Complete the Acid Bench 12 quiz.
  6. Open a helpdesk ticket and request a checkout.
  7. A tool engineer will schedule a time for checkout.

Maintenance

  • Bench is checked for issues twice a week during lab clean
  • Nanostrip is changed by staff weekly on Thursdays at 9:30
  • Chromium etch and gold etch are changed by staff every six weeks

User supported maintenance

Please only make the following changes if you have been trained and are comfortable doing this. If you have an issue that is not detailed or are not trained please create a helpdesk ticket.

Chemical Change

Nano-strip Tank Change

Broken DI Gun

  • Go in the back service aisle and turn off the inlet water to the bench
  • Contact staff via a Helpdesk ticket

Broken Nitrogen Gun

Widget text will go here.