Acid Bench 12/Processes/Chromium Etch

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About this Process
Process Details
Equipment Acid Bench 12
Technology Process
Material Cr
Chemicals Used Chromium Etch



This process describes the use of Chromium Etch in Acid Bench 12 for wet etching Chrome.

Procedure

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Characterization

Etch/Dep Rate

750 Ang/min

Uniformity

Mask Selectivity

Limitations

Qualification