Acid Bench 73

Acid Bench 73
Equipment Details
Technology	Wet Bench
Materials Restriction	Metals
Chemicals Used	Acids
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

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Announcements

• Update this with announcements as necessary

Capabilities

• The Acid Bench 73 is for wet processing of with piece parts, 4, and 6 inch samples of mixed materials. This includes 3-5 and 2-6 materials, samples with polymers, and irregularly shaped samples. Wafers that are going into furnaces or other CMOS-clean tools should not be processed in Acid Bench 73.

System Overview

Hardware Details

• Feedback control hot plate
• QDR/Cascade tank
• Bottle wash
• Sink with goose neck
• Open deck space

Substrate Requirements

• Piece Part to 6 inch wafers
• Open to all approved substrates/materials
  • Some materials may require the use of private beakers

Material Restrictions

The Acid Bench 73 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported Processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 73 User Processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard Operating Procedure

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Checkout Procedure

1. Take the General Wet Bench Training
2. Read through this page and the Standard Operating Procedure above.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Complete the training request form for 1440 Acid Bench Training
5. A tool engineer will schedule a time for training.
6. Complete the 1440 Acid Bench quiz.
7. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

There are no staff maintained processes or tanks at this bench.