Acid Bench 73

Acid Bench 73
Equipment Details
Technology	Wet bench
Materials Restriction	Metals
Chemicals Used	Acetic Acid (C2H4O2) Aluminum Etch Buffered HF (BHF) Hydrofluoric acid (HF) Chromium Etch Hydrochloric acid (HCl) Hydrogen peroxide (H2O2) Gold Etch Nanostrip Nitric acid (HNO3) Phosphoric Acid (H3O4P) Sulfuric acid (H2SO4)
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

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Acid Bench 73 is a wet bench used for working with acids, mostly for etching and cleaning of samples that have had metals and/or polymers on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.

Announcements

• Update this with announcements as necessary

Capabilities

Acid Bench 73 is for wet processing of with piece parts, 4, and 6 inch samples of mixed materials. This includes III-V and II-VI materials, samples with polymers, and irregularly shaped samples.

• Feedback controlled hotplate
• Rinse tank can be run as either a Quick dump rinse (QDR) or Overflow tank.
• Sink with goose neck
• Automated Bottle Wash

System Overview

Chemicals Allowed

• Acetic Acid (C₂H₄O₂)
• Aluminum Etch
• Buffered HF (BHF)
• Hydrofluoric acid (HF)
• Chromium Etch
• Hydrochloric acid (HCl)
• Hydrogen peroxide (H₂O₂)
• Gold Etch
• Nanostrip
• Nitric acid (HNO₃)
• Phosphoric Acid (H₃O₄P)
• Sulfuric acid (H₂SO₄)

Hardware Details

• Feedback control hot plate
• Quick dump rinse (QDR)/Cascade tank
• Automatic Bottle Wash
• Sink with goose neck
• Open deck space

Safety

Proper PPE for this bench are apron, face shield, trionic gloves and safety glasses

Warning:

You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always:

• Wear personal protective equipment. Required PPE at this bench is an apron, face shield, and Trionic gloves.
• Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
• Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
• Do not use this bench without proper training.

• Waste from this bench goes into the LNF’s acid waste neutralization system and then to city sewers.
  • No solvents can be used or disposed of here.
  • Solutions which contains toxic materials that cannot be removed by neutralization (such as gold and chromium etch) should not be aspirated or disposed of down the drain.

Substrate Requirements

• Piece Part to 6 inch wafers
• Open to all approved substrates/materials
  • Some materials may require the use of private beakers

Material Restrictions

The Acid Bench 73 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported Processes

There are a variety of chemical processes that can be performed on this bench, including:

• Aluminum Etch
• Aqua Regia
• BHF
• Chromium Etch
• Dilute HF
• Gold Etch
• Nanostrip
• Piranha Etch

If you wish to perform any other processes on this bench, they must be approved by a tool engineer. Please create a helpdesk ticket for assistance.

Standard Operating Procedure

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Checkout Procedure

Checkout on Acid Bench 73 also includes checkout Acid Bench 72, and Acid Bench 82. Please be prepared for this when you reach steps 5 and 6.

1. Take the General Wet Bench Training, if you haven't already.
2. Read through this page and the Standard Operating Procedure above.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Open a Helpdesk ticket and request a checkout.
5. A tool engineer will schedule a time for checkout.
6. Complete the 1440 Acid Bench quiz.
7. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

There are no staff maintained processes or tanks at this bench.