Difference between revisions of "Acid Bench 80"

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|image = acid 80.jpg
 
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|materials =  
 
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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
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==Announcements==
 
==Announcements==
*This tool was formerly known as [[Acid Bench 23]] and was moved over from 1480A
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*This tool was formerly known as [[Acid Bench 23]] and was moved over from 1480A to 1440A.
 +
*Bringing this bench online may require a shutdown of 1440 in order to attach the exhaust. Look for announcements in the monthly update
  
 
==Capabilities==
 
==Capabilities==
 
<!--A more general description of what the tool is capable of doing.-->
 
<!--A more general description of what the tool is capable of doing.-->
* Etch Rate
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This bench is mostly used for beaker processing with a storage tank for leaving samples soaking overnight.  You may leave a chemical soaking in the bath for up to 48 hours.
* Resolution
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===LNF Provided Chemicals===
* Aspect Ratio
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* [[Acetic acid|Acetic Acid (C<sub>2</sub>H<sub>4</sub>O<sub>2</sub>)]]
* Thickness range
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* [[Aluminum Etch|Aluminum Etch]]
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* [[Buffered HF|Buffered HF (BHF)]]
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* [[Hydrofluoric acid|Hydrofluoric acid (HF)]]
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* [[Chromium Etch|Chromium Etch 1020]]
 +
* [[Hydrochloric acid|Hydrochloric acid (HCl)]]
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* [[Hydrogen peroxide|Hydrogen peroxide (H<sub>2</sub>O<sub>2</sub>)]]
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* [[Gold Etch|Gold Etch GE-8111]]
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* [[Nanostrip|Nanostrip]]
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* [[Nitric acid|Nitric acid (HNO<sub>3</sub>)]]
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* [[Phosphoric acid|Phosphoric Acid (H<sub>3</sub>PO<sub>4</sub>)]]
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* [[Sulfuric acid|Sulfuric acid (H<sub>2</sub>SO<sub>4</sub>)]]
  
 
==System overview==
 
==System overview==
 
===Hardware details===
 
===Hardware details===
* Gases
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* Bottle wash
* Pressure
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* Gooseneck sink
* Chuck
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* QDR
* Chamber
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* Overnight storage tank
* RF / Power Specs
 
* Chemicals
 
  
 
===Substrate requirements===
 
===Substrate requirements===
* Wafer Size
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* Wafer Size: any
* Wafer type
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* Wafer type: metals allowed
* Any mounting?
 
* Wafer thickness
 
  
 
===Material restrictions===
 
===Material restrictions===
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==Standard operating procedure==
 
==Standard operating procedure==
 
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{{#widget:GoogleDoc|key=googledocid}}
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A reader friendly version of the SOP can be found with the link here: [https://docs.google.com/document/d/1jur6PQT5Wa9fxLFwP3D5fxbq6N_s4B5NTrenjp39nNM/edit?usp=sharing SOP]
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{{#widget:GoogleDoc|key=1jur6PQT5Wa9fxLFwP3D5fxbq6N_s4B5NTrenjp39nNM}}
  
 
==Checkout procedure==
 
==Checkout procedure==
 
<!-- Describe the checkout procedure for the tool. For example: -->
 
<!-- Describe the checkout procedure for the tool. For example: -->
 +
# Take the [[General Wet Bench Training]], if you haven't already.
 
# Read through this page and the Standard Operating Procedure above.
 
# Read through this page and the Standard Operating Procedure above.
# Complete the training request form [http://examplelink.com here].
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
 
# A tool engineer will schedule a time for initial training.
 
 
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
 
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete the SOP quiz [http://examplelink.com here].
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# Fill out [https://docs.google.com/forms/d/e/1FAIpQLScv9PDTq-3nFVrJf_9HG0xi7wZNZVCEVTcW-IhgWFhlnkds4g/viewform?usp=sf_link Process Information Form]. You will need to fill this out for each bench you plan on using.
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
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# Open a [http://ssel-sched.eecs.umich.edu/sselonline/?view=/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:71231 helpdesk ticket] and request a checkout.
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# A tool engineer will schedule a time for checkout.
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# Complete the [https://docs.google.com/a/lnf.umich.edu/forms/d/1IwHwa3JEJGcszwkrxN2yk-TBiL1SU6uSMczmbZ72MMk/viewform 1440 Acid Bench quiz].
 +
# If you pass the quiz the tool engineer will authorize you on the tool.  If not you will be contacted to repeat.
  
 
==Maintenance==  
 
==Maintenance==  
 
<!-- Describe standard maintenance/qualification tests here -->
 
<!-- Describe standard maintenance/qualification tests here -->
  
===Process name===
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If you break an N2 gun or a DI water gun, please go back into the service aisle to turn off theinlet before making a ticket to inform staff
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Latest revision as of 09:51, 8 October 2021

Acid Bench 80
Acid 80.jpg
Equipment Details
Technology Process Technology
Materials Restriction Metals
Chemicals Used

Acetic Acid (C2H4O2)

Aluminum Etch

Buffered HF (BHF)

Hydrofluoric acid (HF)

Chromium Etch

Hydrochloric acid (HCl)

Hydrogen peroxide (H2O2)

Gold Etch

Nanostrip

Nitric acid (HNO3)

Phosphoric Acid (H3O4P)

Sulfuric acid (H2SO4)
Equipment Manual
Overview System Overview
Operating Procedure SOP
Maintenance Maintenance



The Acid Bench 80 is a wet bench used for working with acids, mostly for etching and cleaning of samples that have had metals and/or polymers on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.

Announcements

  • This tool was formerly known as Acid Bench 23 and was moved over from 1480A to 1440A.
  • Bringing this bench online may require a shutdown of 1440 in order to attach the exhaust. Look for announcements in the monthly update

Capabilities

This bench is mostly used for beaker processing with a storage tank for leaving samples soaking overnight. You may leave a chemical soaking in the bath for up to 48 hours.

LNF Provided Chemicals

System overview

Hardware details

  • Bottle wash
  • Gooseneck sink
  • QDR
  • Overnight storage tank

Substrate requirements

  • Wafer Size: any
  • Wafer type: metals allowed

Material restrictions

The Acid Bench 80 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 80 user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

A reader friendly version of the SOP can be found with the link here: SOP Widget text will go here.

Checkout procedure

  1. Take the General Wet Bench Training, if you haven't already.
  2. Read through this page and the Standard Operating Procedure above.
  3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  4. Fill out Process Information Form. You will need to fill this out for each bench you plan on using.
  5. Open a helpdesk ticket and request a checkout.
  6. A tool engineer will schedule a time for checkout.
  7. Complete the 1440 Acid Bench quiz.
  8. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

If you break an N2 gun or a DI water gun, please go back into the service aisle to turn off theinlet before making a ticket to inform staff