Acid Bench 80

Acid Bench 80
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Equipment Details
Technology	Process Technology
Materials Restriction	Metals
Chemicals Used	Acetic Acid (C2H4O2) Aluminum Etch Buffered HF (BHF) Hydrofluoric acid (HF) Chromium Etch Hydrochloric acid (HCl) Hydrogen peroxide (H2O2) Gold Etch Nanostrip Nitric acid (HNO3) Phosphoric Acid (H3O4P) Sulfuric acid (H2SO4)
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Maintenance	Maintenance

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The Acid Bench 80 is a wet bench used for working with acids, mostly for etching and cleaning of samples that have had metals and/or polymers on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.

Announcements

• This tool was formerly known as Acid Bench 23 and was moved over from 1480A

Capabilities

LNF Provided Chemicals

• Acetic Acid (C₂H₄O₂)
• Aluminum Etch
• Buffered HF (BHF)
• Hydrofluoric acid (HF)
• Chromium Etch 1020
• Hydrochloric acid (HCl)
• Hydrogen peroxide (H₂O₂)
• Gold Etch GE-8111
• Nanostrip
• Nitric acid (HNO₃)
• Phosphoric Acid (H₃PO₄)
• Sulfuric acid (H₂SO₄)

System overview

Hardware details

• Gases
• Pressure
• Chuck
• Chamber
• RF / Power Specs
• Chemicals

Substrate requirements

• Wafer Size
• Wafer type
• Any mounting?
• Wafer thickness

Material restrictions

The Acid Bench 80 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 80 user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

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Checkout procedure

1. Read through this page and the Standard Operating Procedure above.
2. Complete the training request form here.
3. Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:
   1. 1. 1. 1. Helpdesk Ticket] requesting training.
4. A tool engineer will schedule a time for initial training.
5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
6. Complete the SOP quiz here.
7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.