Acid Bench 80

Acid Bench 80
Equipment Details
Technology	Process Technology
Materials Restriction	Metals
Chemicals Used	Acetic Acid (C2H4O2) Aluminum Etch Buffered HF (BHF) Hydrofluoric acid (HF) Chromium Etch Hydrochloric acid (HCl) Hydrogen peroxide (H2O2) Gold Etch Nanostrip Nitric acid (HNO3) Phosphoric Acid (H3O4P) Sulfuric acid (H2SO4)
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Maintenance	Maintenance

The Acid Bench 80 is a wet bench used for working with acids, mostly for etching and cleaning of samples that have had metals and/or polymers on them. It is considered a Metals class tool, so wafers with metal are allowed in the bench with some restrictions. It is intended for use with mixed materials and all substrate sizes up to 6 inches with the main focus being on piece parts.

Announcements

• This tool was formerly known as Acid Bench 23 and was moved over from 1480A to 1440A.
• Bringing this bench online may require a shutdown of 1440 in order to attach the exhaust. Look for announcements in the monthly update

Capabilities

This bench is mostly used for beaker processing with a storage tank for leaving samples soaking overnight. You may leave a chemical soaking in the bath for up to 48 hours.

LNF Provided Chemicals

• Acetic Acid (C₂H₄O₂)
• Aluminum Etch
• Buffered HF (BHF)
• Hydrofluoric acid (HF)
• Chromium Etch 1020
• Hydrochloric acid (HCl)
• Hydrogen peroxide (H₂O₂)
• Gold Etch GE-8111
• Nanostrip
• Nitric acid (HNO₃)
• Phosphoric Acid (H₃PO₄)
• Sulfuric acid (H₂SO₄)

System overview

Hardware details

• Bottle wash
• Gooseneck sink
• QDR
• Overnight storage tank

Substrate requirements

• Wafer Size: any
• Wafer type: metals allowed

Material restrictions

The Acid Bench 80 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 80 user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

A reader friendly version of the SOP can be found with the link here: SOP Widget text will go here.

Checkout procedure

1. Take the General Wet Bench Training, if you haven't already.
2. Read through this page and the Standard Operating Procedure above.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Fill out Process Information Form. You will need to fill this out for each bench you plan on using.
5. Open a helpdesk ticket and request a checkout.
6. A tool engineer will schedule a time for checkout.
7. Complete the 1440 Acid Bench quiz.
8. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

If you break an N2 gun or a DI water gun, please go back into the service aisle to turn off theinlet before making a ticket to inform staff