Difference between revisions of "Acid Bench 92"

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==Capabilities==
 
==Capabilities==
 
<!--A more general description of what the tool is capable of doing.-->
 
<!--A more general description of what the tool is capable of doing.-->
 +
This is a general acid processing wet bench, supported processes are listed below. Many users processes available
 
* Metal etch
 
* Metal etch
 
* Cu plating
 
* Cu plating

Revision as of 12:52, 24 August 2015

Acid Bench 92
71181.jpg
Equipment Details
Technology Wet Bench
Materials Restriction Undefined
Material Processed metals allowed, except corrosive and toxic materials
Mask Materials na
Sample Size na
Chemicals Used acid
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance


Warning Warning: This page has not been released yet.

The Acid Bench 92 is a...

Announcements

  • Update this with announcements as necessary

Capabilities

This is a general acid processing wet bench, supported processes are listed below. Many users processes available

  • Metal etch
  • Cu plating
  • Ni plating
  • In plating
  • Fe-Ni plating
  • HF-Nitric anisotropic Si etch
  • PFC after CMP
  • Piranha Clean

System overview

Hardware details

  • Gases
  • Pressure
  • Chuck
  • Chamber
  • RF / Power Specs
  • Chemicals

Substrate requirements

  • Wafer Size
  • Wafer type
  • Any mounting?
  • Wafer thickness

Material restrictions

The Acid Bench 92 is designated as a Undefined class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 92 user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

Widget text will go here.

Checkout procedure

  1. Read through this page and the Standard Operating Procedure above.
  2. Complete the training request form here.
  3. Create a Helpdesk Ticket requesting training.
  4. A tool engineer will schedule a time for initial training.
  5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  6. Complete the SOP quiz here.
  7. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

Process name