Acid Bench 92

Acid Bench 92
Acid Bench 92
Equipment Details
Technology	Wet bench
Materials Restriction	Undefined
Material Processed	metals allowed, all materials except corrosive and toxic materials
Chemicals Used	acids
Gases Used	na
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Supported Processes
User Processes	User Processes
Maintenance	Maintenance

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The Acid Bench 92 is a multi-process acid bench. It houses several plating processes as well as wafer cleaning processes like piranha, HF and PFC and etches like the HF-Nitric and multiple metal etches. There is no restriction on the materials allowed. There is a strict separation (segregation) in the glass ware to be used depending on the process and all the metal samples are first rinsed in the sink before doing the last clean in the QDR. The QDR is regularly cleaned with sulfuric and the aqua regia mixture in order to keep it ion-free. There is an spinner drier (SRD) associated with this bench for the last cleaning step.

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Capabilities

This is a general acid processing wet bench, supported processes are listed below. Many users processes available

• Metal etch
• Cu plating
• Ni plating
• In plating
• Fe-Ni plating
• HF-Nitric anisotropic Si etch
• PFC after CMP
• Piranha Clean
• HF etch

System overview

Hardware details

• Bench top work: plating.
• Several plating bath, includes sample holder, filters, stirrer, counter electrode and counter electrode holder
• Plating pump for electrolyte recirculation
• Hot plate with temperature control
• Quartz heated tank for ionic clean
• HF tank
• Quartz Piranha tank
• DI rinse tank
• Nitrogen and DI gun
• Waste liquid aspirator

The acid waste goes to neutralization plant before is released into city sewage.

Substrate requirements

• Many sample sizes can be accommodated in this bench. Tanks and existing labware can accommodate up to 150mm wafers.
• Many types of materials are allowed in this bench.

Material restrictions

The Acid Bench 92 is designated as a Undefined class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Safety

Working with chemicals can be very dangerous. Chemicals used at this bench are some of the most hazardous in the lab. To minimize the chance of accident, make sure you always: Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff. Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work. Can process pieces, 4” and 6” wafers. Do not use this bench without proper training Waste from this bench goes into the LNF's acid waste neutralization system and then to the city sewers. No solvents can be used or disposed of in this bench. Wear the recommended PPE

Supported processes

There are several processes for this tool supported by the LNF, which are described in more detail on the Processes page.

New processes:

• Discuss with Staff
• Write and SOP
• Practice with staff the first time process is run
• Correct SOP

In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on Acid Bench 92 user processes. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

Standard operating procedure

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Checkout procedure

1. Read through this page and the general Standard Operating Procedure above.
2. If new process, must create an SOP and get it approved by staff. Template for SOP is here.
3. Create a Helpdesk Ticket requesting training.
4. A tool engineer will schedule a time for initial training.
5. Practice with your mentor or another authorized user until you are comfortable with tool operation.
6. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

General maintenance

Besides the general cleaning during lab clean, this bench different baths and the D/R gets treated with 10% sulfuric regularly