Difference between revisions of "Aluminum"
Jump to navigation
Jump to search
| Line 35: | Line 35: | ||
====[[Sputter_deposition|Sputter deposition]]==== | ====[[Sputter_deposition|Sputter deposition]]==== | ||
| + | * [[Lab 18-1]] | ||
| + | * [[Lab 18-2]] | ||
| + | * [[PVD 75 Proline|PVD 75]] | ||
| + | |||
===Etch Processes=== | ===Etch Processes=== | ||
====[[Wet etching|Wet etching]]==== | ====[[Wet etching|Wet etching]]==== | ||
Revision as of 11:57, 6 April 2020
 Warning: | This page has not been released yet. |
| Aluminum | |
|---|---|
| Material Details | |
| Material Restriction | Undefined |
Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.
Contents
Applications
- Discuss common uses/applications for this material. Why this materials is used in the LNF?
Processing Tools
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
Deposition Equipment
Etching Equipment
- Acid Bench 12 - maintained tank
- Acid Bench 73 - Beaker
- Acid Bench 82 - Beaker
Processes
E-beam evaporation
Sputter deposition
Etch Processes
Wet etching
Wet etching can be used to etch aluminum using Aluminum Etch
References
- Etch rates for micromachining processing https://ieeexplore.ieee.org/abstract/document/546406
- Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/abstract/document/1257354
