Difference between revisions of "Aluminum"
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*[[Wet etching|Wet etching]] | *[[Wet etching|Wet etching]] | ||
Wet etching can be used to etch aluminum using [[Aluminum Etch]] | Wet etching can be used to etch aluminum using [[Aluminum Etch]] | ||
| + | *[[Reactive ion etching]] | ||
==References== | ==References== | ||
*'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406 | *'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406 | ||
*'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354 | *'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354 | ||
Revision as of 11:02, 6 April 2020
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| Aluminum | |
|---|---|
| Material Details | |
| Material Restriction | Undefined |
Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.
Contents
Applications
- Discuss common uses/applications for this material. Why this materials is used in the LNF?
Processing Tools
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
Deposition Equipment
Etching Equipment
- Acid Bench 12 - maintained tank
- Acid Bench 73 - Beaker
- Acid Bench 82 - Beaker
- LAM 9400
Depositoin Processes
Etch Processes
Wet etching can be used to etch aluminum using Aluminum Etch
References
- Etch rates for micromachining processing https://ieeexplore.ieee.org/abstract/document/546406
- Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/abstract/document/1257354
