Difference between revisions of "Aluminum"

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*[[Acid Bench 80]] - Beaker
 
*[[Acid Bench 80]] - Beaker
 
*[[LAM 9400]]
 
*[[LAM 9400]]
 
+
==Processes==
==Depositoin Processes==
+
===Depositoin Processes===
 
*[[Electron_beam_evaporation|E-beam evaporation]]
 
*[[Electron_beam_evaporation|E-beam evaporation]]
  
 
*[[Sputter_deposition|Sputter deposition]]
 
*[[Sputter_deposition|Sputter deposition]]
  
==Etch Processes==
+
===Etch Processes===
 
*[[Wet etching|Wet etching]]
 
*[[Wet etching|Wet etching]]
 
**Wet etching can be used to etch aluminum using [[Aluminum Etch]] at [[Acid Bench 12]], [[Acid Bench 73]], and [[ Acid Bench 80]].  
 
**Wet etching can be used to etch aluminum using [[Aluminum Etch]] at [[Acid Bench 12]], [[Acid Bench 73]], and [[ Acid Bench 80]].  

Revision as of 17:46, 6 April 2020

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Aluminum
Material Details
Material Restriction Undefined



Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.

Applications

  • Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processing Equipment

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

Etching Equipment

Processes

Depositoin Processes

Etch Processes

References