Difference between revisions of "Aluminum"
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==References== | ==References== | ||
| − | * | + | *'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406 |
| + | *'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354 | ||
Revision as of 15:56, 31 March 2020
 Warning: | This page has not been released yet. |
| Aluminum | |
|---|---|
| Material Details | |
| Material Restriction | Undefined |
Aluminium is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.
Contents
Processing Tools
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
Deposition Equipment
Etching Equipment
- Wet Etching
- Acid Bench 12 - maintained tank
- Acid Bench 73 - Beaker
- Acid Bench 82 - Beaker
Processes
- List of processes for this material
Deposition
Etching
Chemical etching is done using Aluminum Etch. You can find etch rates for aluminum from ["Etch rates for micromachining processing"] and ["Etch rates for micromachining processing-Part II"].
References
- Etch rates for micromachining processing https://ieeexplore.ieee.org/abstract/document/546406
- Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/abstract/document/1257354
