Difference between revisions of "Aluminum"
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| − | + | Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group. | |
==Processing Tools== | ==Processing Tools== | ||
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**[[Acid Bench 82]] - Beaker | **[[Acid Bench 82]] - Beaker | ||
| − | + | ==Processes== | |
* List of processes for this material | * List of processes for this material | ||
===Deposition=== | ===Deposition=== | ||
Revision as of 14:57, 31 March 2020
 Warning: | This page has not been released yet. |
| Aluminum | |
|---|---|
| Material Details | |
| Material Restriction | Undefined |
Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.
Contents
Processing Tools
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
Deposition Equipment
Etching Equipment
- Wet Etching
- Acid Bench 12 - maintained tank
- Acid Bench 73 - Beaker
- Acid Bench 82 - Beaker
Processes
- List of processes for this material
Deposition
Etching
Chemical etching is done using Aluminum Etch. You can find etch rates for aluminum from ["Etch rates for micromachining processing"] and ["Etch rates for micromachining processing-Part II"].
References
- Etch rates for micromachining processing https://ieeexplore.ieee.org/abstract/document/546406
- Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/abstract/document/1257354
