Difference between revisions of "Aluminum"

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*[[Acid Bench 82]] - Beaker
 
*[[Acid Bench 82]] - Beaker
  
==Processes==
+
==Depositoin Processes==
====[[Electron_beam_evaporation|E-beam evaporation]]====
+
*[[Electron_beam_evaporation|E-beam evaporation]]
  
====[[Sputter_deposition|Sputter deposition]]====
+
*[[Sputter_deposition|Sputter deposition]]
  
===Etch Processes===
+
==Etch Processes==
====[[Wet etching|Wet etching]]====
+
*[[Wet etching|Wet etching]]
 
Wet etching can be used to etch aluminum using [[Aluminum Etch]]
 
Wet etching can be used to etch aluminum using [[Aluminum Etch]]
*[[Acid Bench 12]]
 
*[[Acid Bench 73]]
 
  
 
==References==
 
==References==
 
*'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406
 
*'''Etch rates for micromachining processing''' https://ieeexplore.ieee.org/abstract/document/546406
 
*'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354
 
*'''Etch rates for micromachining processing-Part II''' https://ieeexplore.ieee.org/abstract/document/1257354

Revision as of 11:01, 6 April 2020

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Aluminum
Material Details
Material Restriction Undefined



Aluminum is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.

Applications

  • Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

Etching Equipment

Depositoin Processes

Etch Processes

Wet etching can be used to etch aluminum using Aluminum Etch

References