Aluminum

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Aluminium is a metal that is a silvery-white, soft, non-magnetic and ductile in the boron group.

Aluminum
Material Details
Material Restriction	Undefined

Contents

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

Etching Equipment

• Wet Etching
  • Acid Bench 12 - maintained tank
  • Acid Bench 73 - Beaker
  • Acid Bench 82 - Beaker

Processes

• List of processes for this material

Deposition

Etching

Chemical etching is done using Aluminum Etch. You can find etch rates for aluminum from ["Etch rates for micromachining processing"] and ["Etch rates for micromachining processing-Part II"].

References

• Etch rates for micromachining processing https://ieeexplore.ieee.org/abstract/document/546406
• Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/abstract/document/1257354