Difference between revisions of "Angstrom Engineering Furnace"
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==Maintenance== | ==Maintenance== | ||
| − | * Preventive maintenance for this tool is not necessary. We just fix it when it breaks. | + | <!--* Preventive maintenance for this tool is not necessary. We just fix it when it breaks.--> |
| + | If there is an issue with the tool, please create a helpdesk ticket. | ||
Revision as of 11:40, 15 September 2016
 | This article's lead section may not adequately summarize key points of its contents. |
| Angstrom Engineering Furnace | |
|---|---|
 | |
| Equipment Details | |
| Technology | Thermal processing |
| Materials Restriction | Metals |
| Material Processed | CNT, Graphene |
| Sample Size | pieces up to 4" wafers |
| Gases Used | N2, Ar, He, O2, H2, CH4, C2H2, C2H4 |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Maintenance | Maintenance |
The Angstrom Engineering Furnace is a high temperature furnace for annealing, carbon nanotubes growth and graphene deposition.
Contents
Announcements
- No announcements at this time.
Capabilities
- Annealing (up to 1000°C)
- Carbon nanotube growth
- Graphene deposition
 | This section's factual accuracy is disputed. |
System overview
Hardware details
- Gases
- Nitrogen (N2) - 10,000 sccm
- Argon (Ar) - 1000 sccm
- Helium (He) - 1000 sccm
- Oxygen (O2) - 1000 sccm
- Hydrogen (H2) - 50 sccm
- Methane (CH4) - 20 sccm
- Acetylene (C2H2) - 1000 sccm
- Ethylene (C2H4) - 1000 sccm
- Hydrogen (H2) - 1000 sccm
- Methane (CH4) - 1000 sccm
- Pressure
- Gauge 1: 1-760 Torr
- Gauge 2: 0-1 Torr
- Lamp heated assemblies
- Up to 1000°C
- Up to 100°C/min ramp rate
- Multiple assemblies
- 2" annealing assembly
- 2" CNT assembly
- 2" graphene assembly
- 6" annealing assembly
Substrate requirements
- 2" assemblies can accommodate small pieces
- 6" assembly can accommodate pieces up to 150mm (6") wafers
Material restrictions
 | This tool has an incomplete or incorrect approved material list. |
The Angstrom Engineering Furnace is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Approved materials
Supported processes
There are currently no supported processes for this tool. For assistance developing custom recipes, please create a helpdesk ticket.
Standard operating procedure
| This article 's SOP does not follow the LNF Equipment Manual Guidelines. |
Widget text will go here.
Checkout procedure
- Read the Standard Operating Procedure above.
- Create a Help desk Ticket requesting training.
- A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
- Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
If there is an issue with the tool, please create a helpdesk ticket.
