Difference between revisions of "Angstrom Engineering Furnace"

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|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
The [[{{PAGENAME}}]] is a high temperature furnace for [[annealing]], [[carbon nanotubes]] growth and [[graphene]] deposition.   
The [[{{PAGENAME}}]] is a high temperature furnace for [[annealing]], [[carbon nanotubes]] growth and [[graphene]] deposition.   

Revision as of 10:13, 19 October 2021

Angstrom Engineering Furnace
Equipment Details
Technology Thermal processing
Materials Restriction Metals
Material Processed CNT, Graphene
Sample Size pieces up to 4" wafers
Gases Used N2, Ar, He, O2, H2, CH4, C2H2, C2H4
Equipment Manual
Overview System Overview
Operating Procedure SOP
Maintenance Maintenance

The Angstrom Engineering Furnace is a high temperature furnace for annealing, carbon nanotubes growth and graphene deposition.


  • No announcements at this time.


  • Annealing
    • Up to 1100°C - 2" assembly
    • Up to 1050°C - 6" assembly
  • Carbon nanotube growth
  • Graphene deposition

System overview

Hardware details

Substrate requirements

  • 2" assemblies can accommodate small pieces
  • 6" assembly can accommodate pieces up to 150mm (6") wafers

Material restrictions

The Angstrom Engineering Furnace is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Supported Processes

Process Details

Characterization Data

Standard operating procedure

  1. Quick reference SOP
  2. 2" Assembly removal and installation procedure

Checkout procedure

  1. Create a Help desk Ticket requesting training.
  2. A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
  3. Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.