Angstrom Engineering Furnace

The Angstrom Engineering Furnace is a high temperature furnace for annealing, carbon nanotube growth and graphene deposition.

Angstrom Engineering Furnace
Equipment Details
Technology	Thermal processing
Materials Restriction	Metals
Material Processed	CNT, Graphene
Sample Size	pieces up to 4" wafers
Gases Used	N2, Ar, He, O2, H2, CH4, C2H2, C2H4
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Maintenance	Maintenance

Contents

Announcements

• No announcements at this time.

Capabilities

• Annealing
  • Up to 1100°C - 2" assembly
  • Up to 950°C - 6" assembly
• Carbon nanotube growth
• Graphene deposition

System overview

Hardware details

• Gases
  • Nitrogen (N₂) - 10,000 sccm
  • Argon (Ar) - 1000 sccm
  • Helium (He) - 1000 sccm
  • Oxygen (O₂) - 1000 sccm
  • Hydrogen (H₂) - 50 sccm
  • Methane (CH₄) - 20 sccm
  • Acetylene (C₂H₂) - 1000 sccm
  • Ethylene (C₂H₄) - 1000 sccm
  • Hydrogen (H₂) - 1000 sccm
  • Methane (CH₄) - 1000 sccm
• Pressure
  • Gauge 1: 1-760 Torr
  • Gauge 2: 0-1 Torr
• Lamp heated assemblies
  • Up to 1100°C - 2" assembly
  • Up to 950°C - 6" assembly
  • Up to 100°C/min ramp rate
• Multiple assemblies
  • 2" annealing assembly
  • 2" CNT assembly
  • 2" graphene assembly
  • 6" annealing assembly

Substrate requirements

• 2" assemblies can accommodate small pieces only
• 6" assembly can accommodate pieces up to 150mm (6") wafers

Material restrictions

The Angstrom Engineering Furnace is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported Processes

Process Details

Characterization Data

• Ramp down rate 2" assembly

Standard operating procedure

1. Quick reference SOP
2. 2" Assembly removal and installation procedure

Checkout procedure

1. Create a Help desk Ticket requesting training.
2. LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
3. Schedule a checkout session with a tool engineer via the existing ticket. If this checkout is successful, the engineer will authorize you on the tool.