Angstrom Engineering Furnace
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 | This article's lead section may not adequately summarize key points of its contents. |
| Angstrom Engineering Furnace | |
|---|---|
 | |
| Equipment Details | |
| Technology | Thermal processing |
| Materials Restriction | Metals |
| Material Processed | CNT, Graphene |
| Sample Size | pieces up to 4" wafers |
| Gases Used | N2, Ar, He, O2, H2, CH4, C2H2, C2H4 |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Maintenance | Maintenance |
The Angstrom Engineering Furnace is a high temperature furnace for annealing, carbon nanotubes growth and graphene deposition.
Contents
Announcements
- No announcements at this time.
Capabilities
- Annealing (up to 1000°C)
- Carbon nanotube growth
- Graphene deposition
 | This section's factual accuracy is disputed. |
System overview
Hardware details
- Gases
- Nitrogen (N2) - 10,000 sccm
- Argon (Ar) - 1000 sccm
- Helium (He) - 1000 sccm
- Oxygen (O2) - 1000 sccm
- Hydrogen (H2) - 50 sccm
- Methane (CH4) - 20 sccm
- Acetylene (C2H2) - 1000 sccm
- Ethylene (C2H4) - 1000 sccm
- Hydrogen (H2) - 1000 sccm
- Methane (CH4) - 1000 sccm
- Pressure
- Gauge 1: 1-760 Torr
- Gauge 2: 0-1 Torr
- Lamp heated assemblies
- Up to 1000°C
- Up to 100°C/min ramp rate
- Multiple assemblies
- 2" annealing assembly
- 2" CNT assembly
- 2" graphene assembly
- 6" annealing assembly
Substrate requirements
- 2" assemblies can accommodate small pieces
- 6" assembly can accommodate pieces up to 150mm (6") wafers
Material restrictions
 | This tool has an incomplete or incorrect approved material list. |
The Angstrom Engineering Furnace is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Approved materials
Supported processes
There are currently no supported processes for this tool. For assistance developing custom recipes, please create a helpdesk ticket.
Standard operating procedure
| This article 's SOP does not follow the LNF Equipment Manual Guidelines. |
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Checkout procedure
- Read the Standard Operating Procedure above.
- Create a Help desk Ticket requesting training.
- A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
- Schedule a checkout session with a tool engineer via the Help desk Ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
- Preventive maintenance for this tool is not necessary. We just fix it when it breaks.
