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This page displays recent announcements and updates for the Lurie Nanofabrication Facility. Links to archived announcements and updates are available at the end of the page.
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A list of tool repairs and limited statuses is available here.


Contents

Strobic Fan Shutdown Fall 2025, week of October 13th

Update: LNF reopening delayed to 12:30pm on 10/15/25.

The scope of the maintenance tasks has been updated and the LNF shutdown will be much shorter: LNF spaces will only be closed to processing on Wednesday October 15th, 4am to noon. Please check the scheduler for tool-specific up to date information

Announcements October 2025

  • LNF News and Events
    • LNF Closure on 10/15/25
    • LNF User Communication Meeting on 10/14/25
    • LNF PVD Tech Talk on 10/15/25
    • EECS 423 beginning on 10/27/25
    • 2025 LNF Photo Contest - Voting Now Open!
    • Announcements
    • Job Openings
    • Defenses
  • Tool Updates
    • Angstrom Engineering Furnace
    • Tempress Stack 1 Tube 2 - LTO
    • EVG Bonders
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)


Announcements September 2025

  • LNF News and Events
    • LNF Closure the Week of 10/13/25
    • LNF Smart Start in the clean room beginning 9/26/25
    • Staffing Updates
    • Free PDA Bags and Belts available
    • EECS 423 beginning on 10/27/25
    • LNF PVD Tech Talk on 10/15/25
    • Announcements
    • Job Openings
    • Defenses
  • Tool Updates
    • SU-8 transition to 3000 series
    • Solvent 94 SOP binder has been streamlined
    • Acid Bench 12 & Mask Bench 13 Nanostrip Schedule Change
    • Angstrom Engineering Furnace Tube Change Reminder
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Announcements August 2025

  • LNF News and Events
    • 2025 LNF Photo Contest
    • LNF User Communication Meeting on 8/21/25
    • LNF User Committee BBQ on August 22nd
    • Labor Day Schedule Reminder
    • LNF Tech Talk on PVD - Fall 2025
    • Announcements
    • Job Openings
    • Defenses
  • Tool Updates
    • Heidelberg DWL66+ Laser Lithography System Supported Processes
    • Heidelberg DWL66+ Laser Lithography Write Head Rotation Schedule
    • SEM Maintenance Update
    • New Nikon L200N and Keyence VHX-7000 Microscopes
    • YES Plasma Stripper
    • Olympus BX 51 Fluorescent Microscope
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Announcements July 2025

  • LNF News and Events
    • 2025 LNF Photo Contest
    • Dress Code Reminder
    • Strobic Fan Shutdown Fall 2025
    • Lab Supply Item - Oval Head Foam Tip Swab Discontinued
    • Job Openings
    • Defenses
  • Tool Updates
    • Hotplates
    • Glen 1000P Asher Now Plumbed with Nitrogen
    • CEE Apogee ROBIN
    • Heidelberg DWL66+ Laser Lithography System is Online
    • New Nikon L200N and Keyence VHX-7000 Microscopes
    • YES Plasma Stripper
  • IT Updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Announcements June 2025

  • LNF News and Events
    • Nanocamp in the clean room June 16 - 26, 2025
    • Fourth of July Schedule Reminder
    • Dress Code Reminder
    • Strobic Fan Shutdown Fall 2025
    • Job Openings
    • Defenses
  • Tool Updates
    • Heidelberg DWL66+ Laser Lithography System is Online
    • AE Evaporator Palladium
    • Advanced PEC for JEOL EBL
    • ADT Dicing Saw
  • IT Updates
    • CAD computer updates
    • Input Needed: Upgrade of Lab Management System (Online Services)

Archived Announcements and Updates

Other