Archived Financial Memos

This page includes links to archived financial announcements and memos related to the Lurie Nanofabrication Facility. Current/recent memos are available from this page.

2023

Fee schedules were updated in January 2023 for internal users (charged to U-M shortcode), U.S. academic and government users, and non-academic and foreign users. Key updates were:

• Room rates (daily and entry fees) did not change.
• Most tool rates increased by about 3%, i.e. for academic rates +$1/hr or +$2/hr above their previous value.
• Due to higher maintenance/consumable costs on a few tools, their rates went up by more than 3%. None of these increases exceeded +$3/hr above their previous academic rate.
• The JEOL e-beam lithography tool rate did not change.
• The usage and billing structure for PDMS processing was updated: PDMS kits are no longer be shared among the user community: they are to be purchased by users, and the Solvent 94 bench rate decreased accordingly.
• Note that costs for store items are updated regularly to adjust to market conditions.

2022

No change.

Fiscal Year 2021

Annual fee update: no significant change except for realignment of tool rates for the Glass etcher and LAM 9400 RIE tools. internal (charged to U-M shortcode), U.S. academic and government, and non-academic and foreign rates. Precious metal rates are included in fee schedules (files listed above). (April 2021)

Fiscal Year 2020

Pt deposition process by ALD is released: Material surcharge included in files linked below. (June 2019)

Fiscal Year 2019

• Annual fee update: internal (charged to U-M shortcode), external U.S. academic, and non-academic and foreign rates. Precious metal rates are now included in fee schedules (files listed above). (January 2019)

Fiscal Year 2018

• Annual fee update: internal (charged to U-M shortcode), external U.S. academic or government, and non-academic and foreign rates. Precious metal rates for internal, external U.S. academic, and for non-academic users. (March 2018)

Fiscal Year 2017

• Annual fee update: internal (charged to U-M shortcode), external U.S. academic, and non-academic and foreign rates. Precious metal rates for internal, external U.S. academic, and for non-academic users. (October 2016)

Fiscal Year 2016

• Annual fee update: academic and non-academic and foreign rates. Precious metal rates for academic users and for non-academic users. (January 2016)
• Updated subsidy program for internal users (January 2016). For general reference about the user subsidy program, please see here

Fiscal Year 2015

• Summary of changes effective January 2015
• Annual fee update: academic and non-academic and foreign rates. Precious metal rates for academic users and for non-academic users. (January 2015)
• Subsidy program for internal users update. (January 2015)

Fiscal Year 2014

• Calculation and Optimization of LNF Charges (May 2014)
• Quarterly fee update: academic and non-academic and foreign (July 2013)
• Effective June 1, 2013 precious metals (Au, Pt, Ir, and Pd) fees are separated from PVD tool rates. Precious metals fees will be (these are the academic rates; non-academic rates are calculated using the External Non-Academic multiplier): Lab 18-2 Au= $22/1000Å, Pt= $78/1000Å, Ir= $141/1000Å Evaporators Au= $56/1000Å, Pt= $90/1000Å, Pd= $40/1000Å. Please note that, when precious metals are actually used for a deposition, their cost will be charged to the user even if the tool base charge is forgiven by the tool engineer.

Fiscal Year 2013

• Announcement about July 2013 external non-academic multiplier update (June 2013)
• Quarterly fee update: academic and non-academic and foreign (March 2013)
• Quarterly fee update: academic and non-academic and foreign (December 2012)
• Quarterly fee update: academic and non-academic and foreign (July 2012)

Fiscal Year 2012

• Quarterly fee update: academic and non-academic and foreign (April 2012)
• Announcement about July 2012 external non-academic multiplier update (January 2012)
• Quarterly fee update: academic and non-academic and foreign (January 2012)
• Quarterly memos about fee updates: internal and external (July 2011)

Fiscal Year 2011

• Quarterly memos about fee updates: internal and external (April 2011)
• Tool Billing Policy (March 2011)
• Cost model summary and billing procedure (December 2010)
• Fee structure, billing types and transition details (July 2010)

Fiscal Year 2010

• Support of faculty labs outside of LNF (February 2010)
• Fee transition memos for cleanroom and wet chemistry (October 2009)
• Per use fee structure memo (March 2009); and fee structure details for academic users and non-academic and foreign users (effective July 2009)