Difference between revisions of "Argon"

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(Created page with "<!-- Make sure to add any other relevant categories --> Category:Chemicals {{warning|This page has not been released yet.}} Argon is a noble gas used in :Category:RIE|r...")
 
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[[Category:Chemicals]]
 
[[Category:Chemicals]]
 
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Argon is a noble gas used in [[:Category:RIE|reactive ion etching]].  It is non-reactive and has a high mass which generally causes a more physical etch. It is also used in ???
Argon is a noble gas used in [[:Category:RIE|reactive ion etching]] and xyz.
 
  
 
==Equipment==
 
==Equipment==
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*[[STS_Pegasus_6]]
 
*[[STS_Pegasus_6]]
 
*[[STS_Glass_Etcher]]
 
*[[STS_Glass_Etcher]]
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*[[P500_RIE]]
 
*[[LAM_9400]]
 
*[[LAM_9400]]
 
*[[Plasmatherm 790]]
 
*[[Plasmatherm 790]]
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*[[YES_Plasma_Stripper]]
  
 
==References==
 
==References==
 
* [http://en.wikipedia.org/wiki/Argon Wikipedia page]
 
* [http://en.wikipedia.org/wiki/Argon Wikipedia page]
 
* [http://www.praxair.com/~/media/North%20America/US/Documents/SDS/Argon%20Gas%20Ar%20Safety%20Data%20Sheet%20SDS%20P4563.pdf SDS]
 
* [http://www.praxair.com/~/media/North%20America/US/Documents/SDS/Argon%20Gas%20Ar%20Safety%20Data%20Sheet%20SDS%20P4563.pdf SDS]

Revision as of 11:29, 20 April 2015

Warning Warning: This page has not been released yet.

Argon is a noble gas used in reactive ion etching. It is non-reactive and has a high mass which generally causes a more physical etch. It is also used in ???

Equipment

References