Difference between revisions of "Argon"

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==Equipment==
 
==Equipment==
*[[STS_Pegasus_4]]
+
*[[STS Pegasus 4]]
*[[STS_Pegasus_6]]
+
*[[STS Pegasus 6]]
*[[STS_Glass_Etcher]]
+
*[[STS Glass Etcher]]
*[[P500_RIE]]
+
*[[P5000 RIE]]
*[[LAM_9400]]
+
*[[LAM 9400]]
 
*[[Plasmatherm 790]]
 
*[[Plasmatherm 790]]
*[[YES_Plasma_Stripper]]
+
*[[YES Plasma Stripper]]
  
 
==References==
 
==References==
 
* [http://en.wikipedia.org/wiki/Argon Wikipedia page]
 
* [http://en.wikipedia.org/wiki/Argon Wikipedia page]
 
* [http://www.praxair.com/~/media/North%20America/US/Documents/SDS/Argon%20Gas%20Ar%20Safety%20Data%20Sheet%20SDS%20P4563.pdf SDS]
 
* [http://www.praxair.com/~/media/North%20America/US/Documents/SDS/Argon%20Gas%20Ar%20Safety%20Data%20Sheet%20SDS%20P4563.pdf SDS]

Revision as of 11:30, 20 April 2015

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Argon is a noble gas used in reactive ion etching. It is non-reactive and has a high mass which generally causes a more physical etch. It is also used in ???

Equipment

References