View source for Bruker Quantax 200 Energy Dispersive X- ray Spectrometer EDS

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|overview = [[{{PAGENAME}}#System_overview | System Overview]]
|sop = [https://link.to.google.doc/preview SOP]
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
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{{warning|This page has not been released yet.}}

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The Bruker QUANTAX 200 Energy Dispersive X- ray Spectrometer (EDS) with XFlash®6 silicon drift detector (SDD) is a modular EDS system for qualitative and quantitative microanalysis. The system’s standard-less quantification software enables manual, automatic or interactive spectra evaluation and provides reliable results for specimens with polished or irregular surfaces, thin layers and particles. The SDD is what makes the XFlash detector extremely fast enabling the procressing of up to 1M signals per second which facilitates real time ColorScan, ultra fastt mapping and elemental mapping.

==Announcements==
*Update this with announcements as necessary

==Capabilities==
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* Etch Rate
* Resolution
* Aspect Ratio
* Thickness range

==System overview==
===Hardware details===
* Gases
* Pressure
* Chuck
* Chamber
* RF / Power Specs
* Chemicals

===Substrate requirements===
* Wafer Size
* Wafer type
* Any mounting?
* Wafer thickness

===Material restrictions===
{{material restrictions}}

==Supported processes== 
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There are several processes for this tool supported by the LNF, which are described in more detail on the [[/Processes/]] page.

<!-- If you allow custom recipes, let users know to contact a tool engineer, and you may also create the link below which will create a page that users can add custom recipes to. -->
In addition to these, this tool has a number of user-created recipes for etching a wide variety of materials. Some of these recipes are documented on [[LNF User:{{BASEPAGENAME}} User Processes|{{BASEPAGENAME}} user processes]]. If you are curious if your material can be processed in this tool, please contact the tool engineers via the helpdesk ticket system.

==Standard operating procedure==
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==Checkout procedure==
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# Read through this page and the Standard Operating Procedure above.
# Complete the training request form [http://examplelink.com here].
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Helpdesk Ticket] requesting training.
# A tool engineer will schedule a time for initial training.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete the SOP quiz [http://examplelink.com here].
# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.

==Maintenance== 
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===Process name===
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