CEE 100CB photoresist spinner
|CEE 100CB photoresist spinner|
|Sample Size||pieces up to 6" wafers|
|Chemicals Used||Acetone, IPA|
|Supported Processes||Supported Processes[IPA]]|
The CEE 100CB Spinner is a fully programmable, manual dispense, photoresist spinner located in the main cleanroom at the LNF. It can accept pieces, 4" and 6" wafers. It is located in 1440C.
None at this time.
- Up to 5K rpm spin rates
- Hot plate maintained at 115°C
- 1x1 cm pieces up to 6" wafers
- No substrate material requirements
- Available Chucks
- 6" Chuck (Ø 3.75")
- 4" Chuck (Ø 2.25")
- Large Piece Chuck (Ø 0.75")
- Small Piece Chuck (Ø 0.25" - chuck ; Ø 0.375" - O-ring)
The CEE 100CB photoresist spinner is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email firstname.lastname@example.org for any material requests or questions.
There are 10 recipe slots in the software, used as follows:
- 8 fixed spin recipes, 1 stripping recipe, 1 manual recipe
- 4 recipes (1000-4000 rpm) for thin resists (e.g. SPR 220 3.0)
- 4 recipes (1000-4000 rpm) for thick resists (e.g. KMPR 1010)
More information on the recipe details can be found in the standard processes document. For more information on photoresist spinning and recommended lithoraphy processes, please read the Lithography page. For information on a specific photoresist, please check the datasheet.
Standard Operating Procedure
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For information on manually dispensing photoresist, please review the EFD DispensGun manual.
- Complete a Lithography training session. If you have already completed this for another tool, you do not need to complete it again.
- Read this page and the SOP.
- Take the quiz found here.
- Create a helpdesk ticket requesting checkout.
A staff member will verify the correctness of your quiz response and schedule a brief checkout session before authorizing you.
The bowl, chucks, and hotplate are cleaned each week during lab clean. The protective lining in the bowl is replaced weekly as necessary.
In the event of a power bump, users may run the startup/shutdown procedure.