CL200 Megasonic Cleaner
CL200 Megasonic Cleaner | |
---|---|
Equipment Details | |
Technology | Wafer bonding |
Materials Restriction | Metals |
Equipment Manual | |
Overview | System Overview |
Operating Procedure | SOP |
Supported Processes | Supported Processes |
User Processes | User Processes |
Maintenance | Maintenance |
The CL200 Megasonic Cleaner is a substrate cleaner that can process 100 mm or 150 mm wafers. It uses either DI with a megasonic action to clean the wafers. The tool then dries the wafers via spinning with IR heating. Wafers should be cleaned in this tool before going into a bonder such as the EVG 520IS or SB-6E Bonder to reduce particulate.
Contents
Capabilities
- Remove particulate from wafers
System Overview
Hardware Details
- 3000 RPM drive
- IR heating to dry off wafers
- Vibratory motor to align wafers
Substrate Requirements
- Primarily 100 mm
- Can be converted to 150 mm
Material Restrictions
The CL200 Megasonic Cleaner is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.
Supported Processes
The CL200 has standard recipes for a megasonic clean with DI. The main editable parameters are the number of scans, number of cycles, and the spin speed.
Recipe | DI | JTB-100 | Comments |
---|---|---|---|
4in Clean Single Wafer | Yes | No | A general purpose clean for 100 mm wafers |
4in RCA Clean Single Wafer | Yes | Yes | A general purpose JTB-100 clean for 100 mm wafers |
6in Clean Single Wafer | Yes | No | A general purpose clean for 150 mm wafers |
6in RCA Clean Single Wafer | Yes | Yes | A general purpose JTB-100 clean for 150 mm wafers |
Standard Operating Procedure
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Checkout Procedure
- Read through this page and the Standard Operating Procedure above.
- Create a Helpdesk Ticket requesting training.
- A tool engineer will schedule a time for initial training.
- Practice with your mentor or another authorized user until you are comfortable with tool operation.
- Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
Maintenance
Once a month the chamber is inspected and cleaned.